Zeiss Auriga

auriga brochureThe Zeiss Auriga is a dual beam FIB with a field emission electron column for high resolution electron imaging and a Canion Ga+ column for precision ion beam milling.

Key Features:

  • Electron beam operation from 0.1 to 30keV
  • Ion beam operation from 5 to 30keV
  • Super eucentric stage
  • Nano-manipulator for TEM sample prep
  • Sequential cross sectioning for three dimensional image construction


Everhardt-Thornley SE2 detector (for surface topography),
In-lens electron detector (for surface feature/texture analysis)
Backscattered electron detector
Scanning transmission electron detector

Services and Fee Structure:

  • User Fee Unassisted Cost/Hr – $30
  • User Fee Assisted Cost/Hr – $70
  • Additional expenses may apply such as a per sample charge for specimen preparation and charges for consumables used during specimen preparation and microscopy. Users are welcome to supply their own consumables to avoid those charges. The fees listed are for internal UTK users only.
Equipment location:
Advanced Microscopy and Imaging Center 
Science and Engineering Research Facility, room 101
Contact information:
Dr. John Dunlap